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PCB Piezotronics (PCB) has expanded their sensor product line to include several MEMS devices using silicon based technology. Development and production of these sensors has relied on a Plasma-Therm VERSALINE DSE system for several critical deep silicon etching fabrication steps.
These new MEMS based sensor products include a series of shock accelerometers utilized in industrial monitoring applications such as load vibration, pile driving and hole drilling. Additionally, these products are used in aerospace and defense.
Successful etching of a complex silicon-on-insulator (SOI) MEMS device structure enables PCB to produce the industry’s smallest, most accurate and durable shock accelerometer as a result of Plasma-Therm’s low notch etch technology.
“We developed our MEMS shock accelerometer series using the etch technology provided by the VERSALINE DSE system. This system has been a crucial element in advancing our sensor technology product collection. To meet our high expectations for quality and to stay at the leading edge of our industry, we use best in class systems like the VERSALINE. Working with an equipment supplier with Plasma-Therm’s expertise was a critical part of our product development,” stated Andrea Tombros, Senior MEMS Design Engineer at PCB.
“Our suite of DSE technologies gives designers a broad canvas and allows them to create new advanced devices. We provide DSE technology that gives our customers confidence to test new ideas and a platform that allows them to implement those ideas into reliable production. VERSALINE continues to be a preferred system for both research laboratories and production facilities alike because it extends the palette of capabilities.” said Dr. David Lishan, Director of Technical Marketing at Plasma-Therm.
Founded in 1967 and located in Depew, NY, PCB Piezotronics is a global leader in the design and manufacture of force, torque, load, strain, pressure, acoustic and vibration sensors, as well as the pioneer of ICP® technology. Core competencies include ICP® and charge output piezoelectric, piezoresistive, strain gage, MEMS and capacitive sensors and instrumentation. With 24-hour customer support; direct sales offices throughout Europe and Asia; and an established global distribution network, PCB® attributes its continued growth to an unwavering commitment to total customer satisfaction.
Plasma-Therm, founded in 1974, is a supplier of advanced plasma process equipment offers etch and deposition technologies. Plasma-Therm systems support various specialty markets including solid state lighting, thin film head, MEMS, photomask and compound semiconductor. To meet the diverse needs of our global customer base, Plasma-Therm has sales, service and spares locations throughout North America, Europe and Asia-Pacific.
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